Development of a high-brightness multicusp ion source for focused ion beam generation, 1

Tsuji, Toshiyuki*; Kobayashi, Akira*; Yoshida, Eiji*; Ichihara, Chikara*; Adachi, Shigeto*; Ishii, Yasuyuki; Haga, Junji

no abstracts in English

Language	:	Japanese
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Meeting title	:	2008年(平成20年)春季第55回応用物理学関係連合講演会
Held date	:	2008/03
Location (city)	:	船橋
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Cooperating Institute	:	神戸製鋼所

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Registration No. : BB20073732
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