Synthesis of self-standing ceramic nano-fiber by single particle nanofabrication technique

Sugimoto, Masaki; Yoshikawa, Masahito; Watanabe, Shogo*; Seki, Shu*

We have succeeded in synthesizing the self-standing silicon carbide (SiC) nano-fiber from Si-based polymers using Single Particle Nanofabrication Technique (SPNT) with multi angle ion beam irradiation. Si-based polymers were cross-linked by MeV-order heavy-ion along ion tracks of nano-size in radius through the whole thickness of the polymer thin film. Nano fibers were developed on the surface of the substrate by dissolution and washing away of un-crosslinked polymer by solvent. Subsequent pyrolysis converted polymeric into inorganic SiC nano fibers.