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Report No.
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Evaluations of optical properties of Co based soft X-ray multilayer gratings

Ishino, Masahiko; Koike, Masato; Sato, Futami*; Terauchi, Masami*; Sano, Kazuo*; Sasai, Hiroyuki*

The multilayer gratings were fabricated by depositing the Co/Si and Co/SiO$$_{2}$$ multilayers onto the surface of laminar-type holographic gratings having shallow grooves. The structures of multilayer gratings observed by a transmission electron microscope showed the well defined structures without serious defects. The structural property evaluated by comparing the measured and calculated diffraction conditions i.e., incidence and diffraction angles, resulted that the diffraction conditions of multilayer gratings were affected by the refractive indices of multilayer coatings even at the photon energy of 8.05 keV. The measured low diffraction efficiencies for the Co/Si multilayer grating in the photon energy range of 1-2 keV would be attributed to the large inter-diffusion in the Co/Si multilayer coating.

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Category:Physics, Applied

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