Recent development of soft-X-ray emission spectroscopy instruments for a conventional analytical transmission electron microscope

Terauchi, Masami*; Koike, Masato

Characterization with nm-scale spatial resolution is important for developments of new functional materials. Information of electronic structure of valence electrons (bonding electrons) is imperative for characterizing a material. A soft-X-ray emission spectroscopy (XES) instrument for a transmission electron microscope (TEM) presented us that a density of states (DOS) of the valence band can be obtained from a specified small specimen area. A project to improve the spectrometer to attach to a conventional analytical TEM has been conducted by using a multilayer-coated VLS grating for the high dispersion type spectrometer. Pt M-emission spectrum showed two peaks of M(2050eV) and M(2127eV). A FWHM value of the M peak was 13 eV.

Language	:	English
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Meeting title	:	9th Asia-Pacific Microscopy Conference (APMC-9)
Held date	:	2008/11
Location (city)	:	Jeju
Location (country)	:	Korea
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Keywords	:	no keyword
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Cooperating Institute	:	東北大学

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Registration No. : BB20081134
JAEA Abstracts No. :
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