Verification of reduction in acceptor density due to displacement of C in Al-doped 4H-SiC by electron irradiation

Nishino, Kozo*; Minohara, Nobumasa*; Matsuura, Hideharu*; Oshima, Takeshi

no abstracts in English

Language	:	Japanese
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Meeting title	:	2008年秋季第69回応用物理学会学術講演会
Held date	:	2008/09
Location (city)	:	春日井
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	電子加速器
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Cooperating Institute	:	大阪電気通信大学

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Registration No. : BB20081665
JAEA Abstracts No. :
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