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Pulsed EPR studies of the T$$_{V2a}$$ center in 4$$H$$-SiC

Isoya, Junichi*; Umeda, Takahide*; Mizuochi, Norikazu*; Oshima, Takeshi

To indentify intrinsic defects in silicon carbide (SiC), a T$$_{V2a}$$ center in 4$$H$$-SiC was investigated using pulsed electron paramagnetic resonance (EPR). The T$$_{V2a}$$ is a center with S=3/2 and C$$_{3V}$$ symmetry, and in previous studies, the origin of the T$$_{V2a}$$ is thought to be a defects of negatively charged Si vacancy (V$$_{Si}$$$$^{-}$$). In this study, T$$_{V2a}$$ centers were introduced in n-type 4$$H$$-SiC samples by MeV range electron irradiation at 10$$^{18}$$ /cm$$^{2}$$. As a result of EPR, pulsed EPR and ENDOR measurements, the origin of the T$$_{V2a}$$center can be identified to be not a simple V$$_{Si}$$$$^{-}$$ defect but the complex between V$$_{Si}$$$$^{-}$$ with Next Nearest Neighbors.

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