Characterization of ablation plasma from h-BN by excimer laser irradiation

Oba, Hironori ; Saeki, Morihisa; Esaka, Fumitaka ; Yamada, Yoichi; Yamamoto, Hiroyuki; Yokoyama, Atsushi

no abstracts in English

Language	:	Japanese
Journal	:	Journal of the Vacuum Society of Japan
Volume	:	52
Number	:	6
Pages	:	p.369 - 371
Publication Year/Month	:	2009/07
Meeting title	:	第49回真空に関する連合講演会
Held date	:	2008/10
Location (city)	:	松江
Location (country)	:	日本
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.3131/jvsj2.52.369
DOI for research data	:
Keywords	:	no keyword
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Registration No. : BB20082594
JAEA Abstracts No. : 38000234
Paper Submission No. : 6840

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