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Report No.

Atomic model and optimization of EUV light source

Nishihara, Katsunobu*; Sunahara, Atsushi*; Sasaki, Akira; Tanuma, Hajime*; Koike, Fumihiro*; Fujioka, Shinsuke*; Nishimura, Hiroaki*; Shimada, Yoshinori*

The critical issue for realization of a laser produced plasma (LPP) extreme ultraviolet (EUV) light source is the conversion efficiency (CE) from incident laser power to EUV radiation of 13.5 nm wavelength. From an atomic physics, we show that tin is the most suitable radiation material compared with xenon and lithium. We also show the optimization of laser and target conditions to obtain high CE using a power balance model. We propose a double-pulse irradiation scheme for high CE using a carbon dioxides laser and a droplet target.



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