Te and ne characteristics of RF plasma with 3-turn internal antenna

Yamauchi, Toshihiko; Takemoto, Ryo*; Yabuno, Masahiro*; Kanno, Yoshinori*; Kobayashi, Seiji*; Shiramizu, Miho*; Takei, Toru*; Kato, Hatsuhiro*; Nakagaki, Keita*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2009年(平成21年)春季第56回応用物理学関係連合講演会
Held date	:	2009/03
Location (city)	:	つくば
Location (country)	:	日本
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Keywords	:	no keyword
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Registration No. : BB20083310
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