Effects of lapping methods on electrical properties of SiC SBD

Tanaka, Yayoi*; Hotta, Kazutoshi*; Kamada, Toru*; Kawata, Kenji*; Oshima, Takeshi; Eryu, Osamu*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2009年(平成21年)春季第56回応用物理学関係連合講演会
Held date	:	2009/03
Location (city)	:	つくば
Location (country)	:	日本
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DOI for research data	:
Keywords	:	no keyword
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Cooperating Institute	:	フジミインコーポレーテッド

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Registration No. : BB20083204
JAEA Abstracts No. :
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