Change in hydrogen amount in a diamond-like carbon film under hyperthermal atomic oxygen exposures

Yokota, Kumiko*; Tagawa, Masahito*; Kitamura, Akira*; Matsumoto, Koji*; Yoshigoe, Akitaka ; Teraoka, Yuden

In this study, in order to investigate basic properties of hydrogen in a diamond-like carbon film, effects on hyperthermal atomic oxygen beam irradiation has been observed. The irradiation of hyperthermal atomic oxygen beams, the elastic recoil detection analysis, and the Rutherford back scattering analysis were performed at Kobe University. It was found that the region of hydrogen decrease became deeper with increasing collision energies. The hydrogen atoms in the diamond-like carbon film was easier to be released comparing with carbon atoms.

Language	:	English
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Meeting title	:	4th Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA-4)
Held date	:	2008/10
Location (city)	:	Matsue
Location (country)	:	Japan
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Keywords	:	no keyword
Research Facility	:	SPring-8(大型放射光施設)
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Cooperating Institute	:	神戸大学

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Registration No. : BB20083553
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