Ionography of submicron foils and nanostructures using ion flow generated in fs-laser cluster plasma
フェムト秒クラスタープラズマで生成されるイオン流を用いたフォイルとナノ構造のサブマイクロンイオノグラフィー
Faenov, A. Y.; Pikuz, T. A.; Pikuz, S. A.*; 福田 祐仁; 神門 正城; 小瀧 秀行; 本間 隆之; 川瀬 啓悟; 亀島 敬*; Pirozhkov, A. S.; 余語 覚文; 反保 元伸; Kartashev, V.*; Skobelev, I. Yu.*; Gasilov, S. V.*; Boldarev, A. S.*; Gasilov, V. A.*; Magunov, A.*; Kar, S.*; Borghesi, M.*; Giulietti, A.*; Cecchetti, C. A.*; 森 道昭; 榊 泰直; 林 由紀雄; Bolton, P.; 中村 龍史; 大道 博行; 田島 俊樹*; 加藤 義章*
; Bulanov, S. V.
Faenov, A. Y.; Pikuz, T. A.; Pikuz, S. A.*; Fukuda, Yuji; Kando, Masaki; Kotaki, Hideyuki; Homma, Takayuki; Kawase, Keigo; Kameshima, Takashi*; Pirozhkov, A. S.; Yogo, Akifumi; Tampo, Motonobu; Kartashev, V.*; Skobelev, I. Yu.*; Gasilov, S. V.*; Boldarev, A. S.*; Gasilov, V. A.*; Magunov, A.*; Kar, S.*; Borghesi, M.*; Giulietti, A.*; Cecchetti, C. A.*; Mori, Michiaki; Sakaki, Hironao; Hayashi, Yukio; Bolton, P.; Nakamura, Tatsufumi; Daido, Hiroyuki; Tajima, Toshiki*; Kato, Yoshiaki*; Bulanov, S. V.
The intense isotropic source of multicharged ions with energy above 300 keV was produced by femtosecond Ti:Sa laser pulses with intensity 4
10
W/cm
absorbed in the supersonic jet of the mixed He and CO
gases. The spatial resolution of the ionographic image not worse than 600 nm was provided. A difference in object thickness of 100 nm was resolved very well for Zr and polymer foils both.