Microstructure evolution of Ge implanted silicon oxide thin films upon annealing treatments

Yu, R. S.*; Maekawa, Masaki; Kawasuso, Atsuo; Sekiguchi, Takashi*; Wang, B. Y.*; Qin, X. B.*; Wang, Q. Z.*

The structural evolution of silicon oxide films with Germanium implantation was traced with a positron beam equipped with positron annihilation Doppler broadening and lifetime spectrometers. Results indicate that the film structure change as a function of the annealing temperature could be divided into four stages: (I) T 300C; (II) 300C T 500C; (III) 600C T 800C; (IV) T 900C. In comparison with stage I, the increased positron annihilation Doppler broadening S values during stage II is ascribed to the annealing out of point defects and coalescence of intrinsic open volumes in silicon oxides. The obtained long positron lifetime and high S values without much fluctuation in stage III suggest a rather stable film structure. Further annealing above 900C brings about dramatic change of the film structure with Ge precipitation. Positron annihilation spectroscopy is thereby a sensitive probe for the diagnosis of microstructure variation of silicon oxide thin films with nano-precipitation.