Study on direct etching of fluoropolymers by heavy ion beam irradiation

Takasawa, Yuya*; Fukutake, Naoyuki*; Takahashi, Tomohiro*; Urakawa, Tatsuya*; Oshima, Yuji*; Gowa, Tomoko*; Shiraki, Fumiya*; Fujita, Hajime*; Oka, Toshitaka ; Murakami, Takeshi*; Oshima, Akihiro*; Hama, Yoshimasa*; Washio, Masakazu*

Fluoropolymers such as PTFE, PFA and FEP were irradiated with heavy ion beam from Medium Energy Beam Port at Heavy Ion Medical Accelerator in Chiba (HIMAC) in NIRS. The direct etching for fluoropolymers was succeeded by various heavy ion beam irradiation, and the etching rates increased with increasing linear energy transfer (LET).

Language	:	English
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Meeting title	:	11th Pacific Polymer Conference 2009 (PPC-11)
Held date	:	2009/12
Location (city)	:	Cairns
Location (country)	:	Australia
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Keywords	:	no keyword
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Registration No. : BB20123494
JAEA Abstracts No. :
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