Development of gas analyzer to aim for speed and high sensitivity and shaping of mass spectrum

Hatano, Toshihisa; Hiratsuka, Hajime ; Abe, Tetsuya 

This study focused on more reproducible pumping time constant of vacuum devices. The mass spectrum measured in non-steady state was corrected with a mathematical technique corresponding to constant pressure in steady state. The correction mass spectrum was evaluated from the viewpoint of the gas analysis. In measuring the sample gas was a pulse gas injection. After injection the gas pressure decreases exponentially. Here was confirmed reproducible pumping time constant by pulsing gas injection and investigated influence of the pumping time constant to the correction mass spectrum. N, O, Ar, CO were measured the above method and analyzed. The correction mass spectrum showed use from the comparison with mass spectrum in The National Institute of Standards and Technology (NIST) mass spectra library as for the analysis enough.