Replication of micro-channels on PDMS using SU-8 mold fabricated by proton beam writing

Shiine, Yasuharu*; Nishikawa, Hiroyuki*; Mori, Toshiki*; Sato, Takahiro; Ishii, Yasuyuki; Kamiya, Tomihiro; Nakao, Ryota*; Uchida, Satoshi*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2010年(平成22年)春季第57回応用物理学関係連合講演会
Held date	:	2010/03
Location (city)	:	平塚
Location (country)	:	日本
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Keywords	:	no keyword
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Cooperating Institute	:	芝浦工業大学

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Registration No. : BB20093789
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