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Departure process of hydrogen from highly-hydrogenated diamond-like carbon film by exposure to synchrotron radiation

Kanda, Kazuhiro*; Yokota, Kumiko*; Tagawa, Masahito*; Tode, Mayumi; Teraoka, Yuden; Matsui, Shinji*

In the present study, we investigated the desorption of hydrogen from highly-hydrogenated diamond-like-carbon (DLC) films by irradiation of synchrotron radiation (SR) soft X-rays in vacuum. The irradiation of SR was carried out at BL-6 of NewSUBARU. The SR energy is ranging from infra red to soft X-ray, which was lower than 1 keV. The hydrogen content in the DLC films has been determined by Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA) techniques. Although the hydrogen content in the low-hydrogenated DLC film was independent on the soft X-ray dose, that for the high-hydrogenated DLC film decreased exponentially with the soft X-ray dose. This implies that the desorption of hydrogen takes place from the high-hydrogenated DLC films by the soft X-ray irradiation.

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