Developments of wavelength-dispersive soft X-ray emission spectrometers for transmission electron microscopes; An Introduction of valence electron spectroscopy for transmission electron microscopy

Terauchi, Masami*; Koike, Masato; Fukushima, Kurio*; Kimura, Atsushi*

Two types of wavelength-dispersive soft-X-ray spectrometers, a high-dispersion type and a conventional one, for transmission electron microscopes were constructed. Both spectrometers were extended energy regions 2000 eV. The best energy resolution of 0.08 eV was obtained for an Al L-emission by using the high-dispersion type. W-M and Si-K emissions were clearly resolved by using the conventional type. Soft-X-ray emission spectroscopy based on transmission electron microscopy has an advantage for obtaining spectra from a single crystalline specimen with a defined crystal setting. From C K-emission spectra of single crystalline graphite with different crystal settings, density of states of - and -bondings were separately derived. Those results demonstrated a method to analyze the electronic states of valence electrons of materials in the nanometer scale based of transmission electron microscopy.