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Real-time observation of anisotropic strain relaxation by three-dimensional reciprocal space mapping during InGaAs/GaAs(001) growth

Suzuki, Hidetoshi*; Sasaki, Takuo*; Sai, Akihisa*; Oshita, Yoshio*; Kamiya, Itaru*; Yamaguchi, Masafumi*; Takahashi, Masamitsu; Fujikawa, Seiji

Real-time three-dimensional reciprocal space mapping measurement during In$$_{0.12}$$Ga$$_{0.88}$$As/GaAs(001) molecular beam epitaxial growth has been performed to investigate anisotropy in relaxation processes. Anisotropies, strain relaxation, and crystal quality in [110] and [1$$bar{1}$$0] directions were simultaneously evaluated via the position and broadness of 022 diffraction. In the small-thickness region, strain relaxation caused by $$alpha$$-dislocations is higher than that caused by $$beta$$-dislocations, and therefore crystal quality along [110] is worse than that along [1$$bar{1}$$0]. Rapid relaxation along both [110] and [1$$bar{1}$$0] directions occurs at almost the same thickness. After rapid relaxation, anisotropy in strain relaxation gradually decreases, whereas crystal quality along [1$$bar{1}$$0] direction, presumably due to $$beta$$-dislocations, becomes better that along [110] direction and the ratio does not decay with thickness.

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Category:Physics, Applied

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