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Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

Tbプラズマを用いる短波長EUV光源のスペクトルと変換効率の解析

佐々木 明; 西原 功修*; 砂原 淳*; 古河 裕之*; 西川 亘*; 小池 文博*

Sasaki, Akira; Nishihara, Katsunobu*; Sunahara, Atsushi*; Furukawa, Hiroyuki*; Nishikawa, Takeshi*; Koike, Fumihiro*

レーザー生成Tbプラズマの発光スペクトルやEUV変換効率を数値計算による原子データをもとに解析した。計算は波長6.5nmの4$$d$$-4$$f$$遷移の発光ピークの構造を再現した。等温膨張プラズマを仮定した簡単なモデルで解析を行い、照射レーザー光強度を高めることによりSnプラズマの同程度のEUV変換効率が得られる可能性があることを示した。

Emission spectrum and conversion efficiency of laser produced terbium plasmas are investigated theoretically on the basis of computational atomic data. It is shown that calculation reproduces the main peak of the experimental spectrum at $$lambda=6.5$$nm, which originates from 4$$d$$-4$$f$$ transitions of near palladium like ions (Tb$$^{19+}$$). Simple model of the isothermal expansion of plasma suggests that efficient emission can be obtained by pumping a plasma with a laser pulse with an intensity approximately one order of magnitude grater than in the case of tin sources at $$lambda=13.5$$nm.

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パーセンタイル:48.82

分野:Physics, Applied

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