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Report No.

Observation of ablation threshold of solid illuminated by EUV laser

Kawachi, Tetsuya; Faenov, A.*; Ishino, Masahiko; Tanaka, Momoko; Inogamov, N. A.*; Khokhlov, V.*; Anisimov, S. I.*; Pikuz, T.*; Hasegawa, Noboru; Nishikino, Masaharu; Imazono, Takashi; Ochi, Yoshihiro

We have observed low ablation threshold of substances illuminated by EUV laser pulse. The ablation threshold was lower by 2-3 orders of magnitude compared with the cases by use of visible or infrared laser pulse. In order to explain the present result, we have performed the computer simulation involving molecular dynamics and hydro-dynamics. The calculated results implied that in the case of EUV laser ablation, high temperature and high pressure region could be generated in localized area, and following strong tenssile stress induced spallative distruction of the substances. This mechanism is completely different from the ablation process induced by visible or infrared laser illumination.



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