Orientation-mediated control of interfacial structure in epitaxial graphene on silicon substrates

Suemitsu, Maki*; Fukidome, Hirokazu*; Takahashi, Ryota*; Imaizumi, Kei*; Handa, Hiroyuki*; Yoshigoe, Akitaka ; Teraoka, Yuden

Formation of SiC thin layers on Si substrates followed by annealing converts the top surface into graphene (graphene on silicon;GOS). Normally, 3C-SiC(111), (110) and (100)-oriented layers are grown on Si(111), (110) and (100) substrates, respectively. Not only 3C-SiC(111) but also 3C-SiC(100) and (110) surfaces, epitaxial graphene layers were produced. The Raman spectra showed the same bands for the three orientations. Synchrotron-radiation X-ray photoelectron spectrum of C1s presented sp carbon atoms for the three orientations. While no interfacial layers are formed on the SiC(100) and SiC(110), the interfacial layer does exist between the graphene and the SiC(111) film. The observation of the equally successful growth of graphene on these low-index SiC surfaces makes the GOS technology aviable in the post-Si device developments.