Fabrication of Cu oxides on single crystal Cu surfaces using hyperthermal O molecular beams

Okada, Michio*; Moritani, Kosuke*; Vattuone, L.*; Savio, L.*; Teraoka, Yuden; Kasai, Toshio*; Rocca, M.*

The use of hyperthermal O molecular beams may improve the quality of thin film growth, for example, for organic films, and allow the production of oxide layers at lower crystal temperatures, avoiding contamination problems and reducing film defects. Collision-induced absorption and local heating of the substrate were shown to be indeed effective in inducing oxide nucleation, opening up new possibilities for the production of nanostructured metal oxides. Herein we offer an overview on recent detailed studies of oxygen adsorption and of the initial stages of CuO and CuO formation on low Miller index and vicinal Cu surfaces. We introduce the hyperthermal molecular beam technique and give some details on the experimental apparatuses. We discuss the available data for Cu(100), Cu(410) and Cu(110) and Cu(111), respectively.