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Oxidation of TiNi surface with hyperthermal oxygen molecular beams

Okada, Michio*; Sowa, Makoto*; Kasai, Toshio*; Teraoka, Yuden

We report results of our detailed studies on the initial oxidation process of TiNi with a 2 eV hyperthermal oxygen molecular beam (HOMB) and thermal O$$_{2}$$ in the backfilling. The oxidation processes are monitored by X-ray photoemission spectroscopy (XPS) measurements in conjunction with synchrotron radiation (SR). In the early stages of oxidation, the precursor mediated dissociative adsorption is the dominant reaction mechanism. In the oxide formation process at higher O coverage, HOMB has the advantage in the dissociation process of O$$_{2}$$ molecules and can make growth of TiO$$_{2}$$ layers with the underlying TiO$$_{x}$$-rich and/or Ni-rich layers. We succeeded in fabricating a thick Ni-free TiO$$_{2}$$ layer, possibly blue colored rutile TiO$$_{2}$$, combining HOMB and surface annealing.

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Category:Chemistry, Physical

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