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An Extension up to 4 keV by a newly developed multilayer-coated grating for TEM-SXES spectrometer

Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Hasegawa, Noboru; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

We have been developing a soft X-ray emission spectroscopy (SXES) instrument for TEM. SXES combined with microscopy should be a hopeful method to reveal physical properties and chemical bonding states of identified small specimen areas of various compounds. Original SXES instruments for conventional transmission electron microscopes basically designed to detect from 60 eV to 1200 eV (or 2000 eV in extended version). For applying to material science, a much wider energy range is necessary. Thus, a new SXES development for electron microscope has started to obtain an energy range from 50 eV to 3800 eV. An extension in lower energy region was achieved by a new aberration corrected (varied-line-spaced: VLS) grating. Conventional gratings in soft-X-ray energy region have gold surface. Au has M-absorption edge at 2.2 keV and shows only a small reflectance higher than the energy. Thus, a new multilayer-coated (MLC) VLS grating has designed and manufactured for obtaining SXES spectra up to 4 keV at a grazing incident angle of 1.35 deg. This development is conducting as one project of Collaborative Development of Innovative Seeds (Practicability verification stage) by Japan Science and Technology Agency.



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