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A Newly developed grating and soft X-ray spectrometer for electron probe microanalyser and transmission electron microscope; An Acquisition of the Li K emission spectrum with high-energy resolution and detection of light elements

電子プローブマイクロアナライザー(EPMA)と透過電子顕微鏡(TEM)のために新しく開発した回折格子と軟X線分光器; 高エネルギー分解でのLi-K発光の取得と軽元素の検出

高橋 秀之*; 飯田 信雄*; 村野 孝訓*; 寺内 正己*; 小池 雅人; 河内 哲哉; 今園 孝志; 長谷川 登; 小枝 勝*; 長野 哲也*; 笹井 浩行*; 大上 裕紀*; 米澤 善央*; 倉本 智史*

Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Terauchi, Masami*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Hasegawa, Noboru; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

高エネルギー分解の軟X線分光は化合物の化学結合状態の有用な情報を与える。寺内らは最近透過型電子顕微鏡(TEM)に搭載する軟X線発光分光器(SXES)を開発し、Al-L発光スペクトルにおいて0.2eVのエネルギー分解を得た。この分光器のエネルギー範囲は60-1200eVである。この結果をさらに広いエネルギー領域に拡張し、特にLi-K発光スペクトルを検出するため、新たに50-200eVで高エネルギー分解を与える収差補正型回折格子を開発している。具体的にはLi-K(55eV), Al-L(70eV), Si-L(100eV), B-K(180eV)などと、C-K(279eV), N-K(392eV), O-K(525eV)などの高次光に対応する。この分光器はTEMだけでなくEPMAにも装着可能である。さらに、EPMAに装着したSXESではX線強度がプローブ電流に比例することを見いだした。このことはトレース物質の解析に非常に有用である。Li-K, Be-K, B-Kの場合、検出限界は数十ppmと評価された。応用例としてはボロントレース解析法が新規に開発された物質の定量的な評価法として有望である。

Soft X-ray spectroscopy with high-energy resolution gives useful information of the chemical bonding states in compounds. Terauchi et al. recently reported a high-energy resolution of 0.2 eV in the Al-L emission spectrum using the previously developed soft X-ray Emission spectrometer (SXES) with a transmission electron microscope. This spectrometer can design to detect the energy from 60 to 1200 eV. In order to progress this result, we had attempted to enhance the detection energy range. Especially to detect the Li-K emission spectrum, we are developing a spectrometer with newly designed aberration corrected gratings. The newly developed grating JS50XL can cover the X-ray energy range from 50 to 200eV with the high energy resolution. It actually means to detect Li-K (55 eV), Al-L (70 eV), Si-L (100 eV), B-K (180 eV) and high order of C-K (279 eV), N-K (392 eV), O-K (525 eV) and so on. This SXES can be equipped not only with TEM, but also with EPMA. Moreover, we found out that attached EPMA with SXES has another strong feature that the X-ray intensity is in directly proportional to probe current. This feature is very useful for the trace element analysis. In the case of Li-K, Be-K and B-K emissions, the detection limits have been evaluated to be a few tens of ppm. For example trace boron analysis is expected to evaluate the newly developed materials quantitatively. This developed spectrometer is hopeful to observe chemical bonding state and trace element analysis in many kinds of fields. In this presentation we report the results for fundamental and actual samples. This development is conducting as one project of Collaborative Development of Innovative Seeds (Practicability verification stage) by Japan Science and Technology Agency.

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