Development of a new grating spectrometer for 50-4000 eV

Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Hasegawa, Noboru; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

Soft X-ray emission spectroscopy (SXES) combined with electron microscopy should be a hopeful method to reveal physical properties and chemical-bonding states of identified small specimen areas of various compounds. A new SXES development for electron microscopes (TEM and electron-probe microanalyzer) has started to obtain an energy range from 50 eV to 4000 eV by using four aberration-corrected (varied-line-spaced: VLS) gratings. An extension in lower energy region was achieved by a design and manufacturing a new VLS grating with a groove density of 1200 l/mm at a grazing incident angle of 4 deg. This grating enables us to detect Li-K emission (54 eV) with an energy resolution of 0.3 eV. A new multilayer-coated (MLC) VLS grating with a groove density of 2400 l/mm has designed and manufactured for obtaining SXES spectra up to 4 keV at a grazing incident angle of 1.35 deg. The material pair of the multilayer is W and BC. This new MLC-VLS grating can measure not only Te-L (3769eV) and L (4030 eV) but also four small structures of Ll, L, L and L. At the same setting, Al-K (1486 eV), Pt-M (2050 eV), Pd-M (2839 eV), In-L (3287 eV) were also observed. This confirms that this newly designed MCL grating works for 1.5-4 keV.