Activities of the evaluation beamline for soft X-ray optical elements (BL-11)

軟X線光学素子評価ビームライン(BL-11)の研究アクティビティ

今園 孝志; 佐野 一雄*; 小池 雅人

Imazono, Takashi; Sano, Kazuo*; Koike, Masato

The optical characteristics of soft X-ray (SX) optical devices have been evaluated by using an evaluation beamline for SX optical elements (BL-11) at SR Center of Ritsumeikan University. Most recent activities are as follows: development of multilayer gratings in the keV region; fabrication and evaluation of spherical normal-incidence multilayer mirrors for a SX laser, reflection mapping of multilayer mirrors used in EUV lithography instruments; determination of Stokes parameters of light by complete polarization analysis; comparative measurement of the diffraction efficiencies mechanically-ruled and holographic gratings. Here, we report on establishment of a beam intensity monitor in front of the refocusing toroidal mirror of the beamline and improvements of an ellipsometric apparatus for the evaluation of polarizing elements and the polarization state of the incident light.