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Temporal donor generation in undoped hydrogenated amorphous silicon induced by swift proton bombardment

Sato, Shinichiro; Sai, Hitoshi*; Oshima, Takeshi; Imaizumi, Mitsuru*; Shimazaki, Kazunori*; Kondo, Michio*

Seebeck coefficient variations of undoped hydrogenated amorphous silicon (a-Si:H) semiconductors due to swift proton irradiation were investigated using an in-situ thermoelectric power measurement system. Undoped a-Si:H irradiated with 3.0 MeV protons at a fluence regime of 3.1$$times$$10$$^{11}$$ - 5.0$$times$$10$$^{12}$$/cm$$^2$$ showed a negative Seebeck coefficient although the Seebeck effect was not observed at fluences above 5.3$$times$$10$$^{13}$$ /cm$$^2$$. These results suggest that donor like centers are generated by low fluence proton irradiation, whereas the donor centers are compensated by radiation-induced defects or themselves disappear after high fluence proton irradiation. These effects decay with time, giving the donor centers a temporal nature.

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Category:Physics, Applied

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