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Report No.

Observation of femtosecond laser ablation process by using the soft X-ray laser interferometer

Yamamoto, Minoru; Hasegawa, Noboru; Terakawa, Kota*; Umeda, Yoshifumi*; Tomita, Takuro*; Ochi, Yoshihiro; Nishikino, Masaharu; Ishino, Masahiko; Imazono, Takashi; Kaihori, Takeshi; Yamagiwa, Mitsuru; Kawachi, Tetsuya; Minami, Yasuo*; Suemoto, Toru

Femtosecond lasers have been used for material processing. However, the physical processes responsible for femtosecond laser ablation have not been understood completely. These processes involve melting, vaporization, re-solidification or ablation, which occur in a very short time from pico- to nano-seconds. To understand the physical processes, it is essential to reveal the dynamics of ultrafast surface morphological change after laser irradiation. At JAEA, the laser-driven plasma soft X-ray laser (SXRL) that has extremely high spatial and spectral purity was constructed. It delivers soft X-ray photons at 89.2 eV (13.9 nm) with a photon number of exceeding $$10^{10}$$, which is sufficient to obtain a single shot interferogram. By using this system, the soft X-ray laser interferometer with the lateral resolution of 1.8 $$mu$$m and a depth resolution of 1 nm was developed. We report on demonstration of time-resolved measurement of femtosecond-laser ablation dynamics by using the soft X-ray laser interferometer.



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