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Report No.

Fabrication of PMMA film waveguides utilizing proton beam writing

Miura, Kenta*; Sato, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Machida, Yuki*; Uehara, Masato*; Kiryu, Hiromu*; Takano, Katsuyoshi*; Okubo, Takeru; Yamazaki, Akiyoshi; Kada, Wataru; Yokoyama, Akihito; Kamiya, Tomihiro; Nishikawa, Hiroyuki*; Sasaki, Tomoyuki*; Hanaizumi, Osamu*

Mach-Zehnder interferometer (MZI) type thermo-optic switches are recently increasing the importance in the fields, such as optical fiber telecommunication and optical interconnection. The optical waveguides using planar polymers are developed as a component of MZI. On the other hand, proton beam writing (PBW), which is a direct-writing technique, has recently attracted much attention as a next generation micro-fabrication technology. In this paper, the fabrication of the optical waveguides was tried to be directly drawn using the PBW technique in a thin polymethyl methacrylate (PMMA) layer spin-coated on a Si substrate because the refractive index of PMMA was increased by proton beam irradiation. As a result of this study, we demonstrated that the straight-line and the Y-junction PMMA film waveguides were successfully fabricated using PBW from the observation of working as a first single-mode at $$lambda$$=1.55 $$mu$$m for long-haul optical fiber telecommunication systems. We will present that the fabrication results of the optical waveguides and future plans in the conference.



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