Kada, Wataru; Yokoyama, Akihito; Koka, Masashi; Takano, Katsuyoshi*; Sato, Takahiro; Kamiya, Tomihiro
An Ion micro-Beam-Induced Luminescence (micro-IBIL) system was newly developed for the evaluation of the accuracy of proton beam writing on solid diamond surface. Fabrication of buried microstructures in bulk diamond (3.0 mm 
3.0 mm 0.5 mm IIa single-crystal diamond) with a scanning microbeam was performed with using scanning focused 3 MeV proton microbeam. Photon counts of IBIL from the diamond were continuously observed and the changes were obtained during the process of PBW. An micro-IBIL image at a-band line of diamond crystal was successfully visualized as the PBW pattern on it through the monochromatic photon counting system of IBIL.
Language |
: | English |
|---|---|---|
Journal |
: | |
Volume |
: | 51 |
Number |
: | 6 |
Pages |
: | p.06FB07_1 - 06FB07_5 |
Publication Year/Month |
: | 2012/06 |
Meeting title |
: | 24th International Microprocesses and Nanotechnology Conference (MNC 2011) |
Held date |
: | 2011/10 |
Location (city) |
: | Kyoto |
Location (country) |
: | Japan |
Paper URL |
: |
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Keywords |
: | no keyword |
Research Facility |
: |
Accesses |
: |
- Accesses |
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InCites™ |
: |
Percentile:34.15 Category:Physics, Applied |
Altmetrics |
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