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Development and performance test of a soft X-ray polarimeter and ellipsometer for complete polarization analysis

完全偏光測定のための軟X線偏光解析装置の開発と性能評価

今園 孝志; 佐野 一雄*; 鈴木 庸氏; 河内 哲哉; 小池 雅人

Imazono, Takashi; Sano, Kazuo*; Suzuki, Yoji; Kawachi, Tetsuya; Koike, Masato

回転検光子法に基づく軟X線偏光解析装置を開発し、立命館大学SRセンターの軟X線ビームラインに設置した。本装置は独立駆動可能な6軸を使って完全偏光測定が可能な光学配置を実現できる。イオンビームスパッタリング法により作製したMo/Si多層膜偏光子を用いて装置の性能試験を実施した。BL-11の直線偏光度が92eVのとき、87%であることがビームラインの建設以来初めて明らかとなった。

A new apparatus for polarimetric and ellipsometric measurements based on the rotating-analyzer method in the soft X-ray region has been designed, constructed, and installed in the soft X-ray beamline BL-11 at the SR Center of Ritsumeikan University, Shiga, Japan. It can realize the optical configurations for the complete polarization analysis by using six independently movable drive shafts. A demonstration of the capabilities of the apparatus has been performed using Mo/Si multilayer polarizers deposited by an ion beam sputtering method. It is for the first time shown that the degree of linear polarization of monochromatized light from the BL-11 is approximately 87% at 92 eV since the beamline has been constructed.

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パーセンタイル:60.25

分野:Instruments & Instrumentation

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