Ultrasoft-X-ray emission spectroscopy using a newly designed wevelength-dispersiv spectrometer attached to a transmission electron microscope

Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

A new grating (JS50XL) for spectroscopy of ultrasoft-X-ray in an energy range of 50-200 eV was designed, manufactured and tested. A spectrometer composed of the grating and a multi-channel plate (MCP) detector was constructed. At the low energy end of this spectrometer, a sharp Fermi-edge of Mg-L emission was observed at 49.5 eV with an energy resolution of 0.15 eV. Li-K emission spectra were obtained from metal-Li, surface-oxidized metal-Li and 5%Li-Al. Relative energy shifts observed in Al-L emission spectra of Al, AlN and MgAlO were explained by shifts of core binding energies (chemical shift) and band gap energies of those materials. Si-L emissions from Si, SiC and SiO (quartz), and P-L emissions from GaP and InP were presented. These ultrasoft-X-ray emission spectra show a successful extension to lower energy range by using the new soft-X-ray emission spectroscopy (SXES) instrument in electron microscopy.