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One-dimentional nanotemplate structure of a Si(110) substrate

Yokoyama, Yuta; Asaoka, Hidehito  ; Sinsarp, A.*; Sasaki, Masahiro*

The Si(110) surface has a quite unique one-dimensional (1-D) structure with 16$$times$$2 reconstruction. Since the perfectly straight rows extend over micrometers, the 16$$times$$2 structure can be a superior template for 1-D nanostructures. In this study, we tried to control the clustering of Ge atoms on the Si(110) - 16$$times$$2 substrate. When Ge is deposited at 523 K, clustering of Ge atoms is found. The size of the cluster was 1$$sim$$2 nm and many of them were located in a step edges. This trend is previously reported by vicinal Si(111) surface. With increasing temperature, the sizes of Ge clusters became larger. These results indicated that the size and alignment of the Ge cluster can be well controlled on the Si(110) - 16$$times$$2 template surface.

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