Development of 3D-micro-fabrication on polymer film by ion beam lithography

Takano, Katsuyoshi*; Seki, Shuhei*; Sato, Takahiro; Ishii, Yasuyuki; Okubo, Takeru; Koka, Masashi; Kada, Wataru; Kamiya, Tomihiro; Sugimoto, Masaki; Nishikawa, Hiroyuki*

no abstracts in English

Language	:	Japanese
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Meeting title	:	第6回高崎量子応用研究シンポジウム
Held date	:	2011/10
Location (city)	:	高崎
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Cooperating Institute	:	芝浦工業大学; 大阪大学

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Registration No. : BB20112228
JAEA Abstracts No. :
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