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Morphological change of PTFE by ion micro beam irradiation

イオンマイクロビーム照射によるPTFEの表面形状変化

喜多村 茜; 佐藤 隆博; 江夏 昌志; 神谷 富裕; 小林 知洋*

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Kobayashi, Tomohiro*

Polytetrafluoroethylene (PTFE) is one of the most important materials for micro electro mechanical system and bio-chemical and medical tools due to its excellent properties. To fabricate microstructures on the surface, synchrotron radiation and ion beam irradiation are effective because PTFE is extremely sensitive to ionization radiation. However, the effects of fast light ion on morphological changes at PTFE surface are not yet clear. In this study, we performed the irradiation of 2-3 MeV proton beam focused on 1 $$mu$$m in diameter and fabricated micro structures on the PTFE surfaces by scanning the beam. As the results, only the irradiated areas were expanded to a direction perpendicular to the original surface due to temperature elevation and gas generation by PTFE molecular degradation during the irradiation. Controlling the thickness of the PTFE sheets and the scanning rate, we could fabricate the several shapes of structure.

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