Ion induced leakage current of SiC-MOS capacitors

Deki, Manato; Makino, Takahiro; Tomita, Takuro*; Oshima, Takeshi; Kojima, Kazutoshi*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2012年(平成24年)春季第59回応用物理学関係連合講演会
Held date	:	2012/03
Location (city)	:	東京
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Registration No. : BB20112752
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