Development of ion luminescence microscopic spectroscopy analysis and imaging system using ion microbeam probe and aerosol characterization

Kada, Wataru; Sato, Takahiro; Yokoyama, Akihito; Koka, Masashi; Kamiya, Tomihiro

Microscopic chemical-sate analysis increases its importance in deciding the behavior of materials, especially with the toxic materials in the environment. Conventional PIXE is not applicable to these usage, however, ion-beam-induced photons can be related to these information. In this study, a new IBA technique of Ion Luminescence Microscopic Spectroscopy (ILUMIS) was developed and applied to the analysis and imaging of the several microscopic targets. The results confirmed that ILUMIS is one of the new promised microbeam technique with sensitivity in chemical analysis.