Development of soft X-ray microscopy using Fresnel zone plate for observation of laser-induce surface dynamics

Nishikino, Masaharu; Baba, Motoyoshi*; Suemoto, Toru; Hasegawa, Noboru; Ishino, Masahiko; Kaihori, Takeshi; Kawachi, Tetsuya; Yamagiwa, Mitsuru

The dynamical processes of the laser-induced surface modifications such as laser ablation come to attract much attention for the micro processing by the ultra-short laser pulse. It is difficult to observe these phenomena directly, because they are non-repetitive, unrepeatable, and occur very rapidly (pico-second) in a very small (micron) area. In order to observe the detailed laser-ablation process, we have developed the proto-type reflected soft X-ray microscopy using the Fresnel zone plate. The experimental setup and spatial resolution of the X-ray microscopy will be presented.