Microfabrication on Teflon surface by MeV-proton-microbeam and keV-nitrogen-ion-beam irradiation

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kobayashi, Tomohiro*; Kamiya, Tomihiro

The micropatterns were created at PTFE surfaces covered with micro-protorusions using proton beam writing (PBW) and subsequent ion beam irradiation. The density of the inner sample was decreased by PBW and their patterns appeared after the keV ion beam irradiation. Their surface was very flat because they were melted by beam heating. The best fluenences of these beams for creating the surface were also obtained.

Language	:	English
Journal	:	Nuclear Instruments and Methods in Physics Research B
Volume	:	307
Number	:
Pages	:	p.610 - 613
Publication Year/Month	:	2013/07
Meeting title	:	18th International Conference on Ion Beam Modifications of Materials (IBMM 2012)
Held date	:	2012/09
Location (city)	:	Qingdao
Location (country)	:	China
Patent information	:
PDF	:
Paper URL	:	https://doi.org/10.1016/j.nimb.2013.01.017
DOI for research data	:
Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
Press Release	:
Article of JAEA R&D Review	:	Microfabrication of Teflon with Ion Microbeams; Development of New Microfabrication Techniques for Polymer Surfaces[/]
Cooperating Institute	:

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InCites™	:	Percentile:44.02 Category:Instruments & Instrumentation
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Registration No. : BB20121170
JAEA Abstracts No. : 41000903
Paper Submission No. : 12847

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