Morphological change of self-organized protrusions of fluoropolymer surface by ion beam irradiation

Kitamura, Akane; Kobayashi, Tomohiro*; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Suzuki, Akihiro*; Terai, Takayuki*

A Teflon surface was covered with micro-protorusions after keV ion beam irradiation. The dense protrusions were formed by etching and subsequent self-organizing. Their formation depended on the ion energy because beam heating and the amount of the molecule scissions gave a significant effect on the density of protrusions. The ion energy had the specific range to create a surface covered with protrusions. In the low energy below 60 keV, the fluence required for get protrusions was very high. The surface was almost smooth with few protrusions while in the energies higher than 350 keV. When the ion energy was between 60 and 350 keV, the density of the protrusions became lower with increasing the energy.