Fabrication of 3D microstructure at teflon by MeV and keV ion beam

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Kobayashi, Tomohiro*

no abstracts in English

Language	:	Japanese
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Meeting title	:	2012年秋季第73回応用物理学会学術講演会
Held date	:	2012/09
Location (city)	:	松山
Location (country)	:	日本
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Keywords	:	no keyword
Research Facility	:	TIARA(イオン照射研究施設)
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Registration No. : BB20121168
JAEA Abstracts No. :
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