Fabrication of micropatterns on teflon by proton beam writing and nitrogen ion beam irradiation

プロトンビームライティングと窒素イオンビーム照射によるテフロン上の微細パターン作製

喜多村 茜; 佐藤 隆博; 江夏 昌志; 神谷 富裕; 小林 知洋*

Kitamura, Akane; Sato, Takahiro; Koka, Masashi; Kamiya, Tomihiro; Kobayashi, Tomohiro*

The micropatterns were fabricated at the Teflon surface covered with dense micro-protrusions. At first, a 3 MeV proton beam was scanned along the pattern at the surface of the original 100-m thick sample. The pattern could be observed with an optical microscope, but the morphological change was not appeared at the surface. After the subsequent irradiation of the 250-keV nitrogen ion beam irradiation, the surface was covered with micro-protrusions and the groove-like depression were appeared along the micropattern scanned by the proton beam. The mechanism was that the sample along the proton beam path was melted during the subsequent ion beam irradiation because their density, especially near the Bragg peak, had decreased. The morphological design can be achieved at the surface of Teflon material by combination of different ion beam irradiation.