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Report No.

Ultimate analysis and state analysis of elements by the electron probe microanalyzer equipped with new wavelength dispersion soft-X-rays emission spectrometer

Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Terauchi, Masami*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

The soft-X-rays spectroscope developed for transmission electron micro scopes (TEM) so far was carried in the electron probe microanalyzer (EPMA). A combination of a newly developed varied-line-spacing (VLS) diffraction grating of JS50XL, and back-illumination type CCD is capable to observe a spectrum simultaneously in an energy region from 50 to 170 eV. In Al-L emission of an aluminum metal, 0.2 eV or less of high energy resolution was obtained. A clear Fermi edge and electronic density of states could be also observed, and the analysis of state in the minute domain became possible. For boron analysis, a VLS diffraction grating of JS200N (energy range: 70-210 eV) was produced, and super-light element analysis in steel of a 10 ppm level also became possible with the analytical curve determination method.



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