A New grating X-ray spectrometer for 2-4 keV enabling a separate observation of In-L and Sn-L emissions of indium tin oxide

Terauchi, Masami*; Takahashi, Hideyuki*; Handa, Nobuo*; Murano, Takanori*; Koike, Masato; Kawachi, Tetsuya; Imazono, Takashi; Hasegawa, Noboru; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*

A new multilayer-coated varied line-spaced grating, JS4000, was fabricated and tested for extending the upper limit of a grating X-ray spectrometer for electron microscopy. This grating was designed for 2-3.8 keV at a grazing incidence angle of 1.35 deg. It was revealed that this new multilayer structure enables us to take soft-X-ray emission spectra continuously from 1.5 keV to 4 keV at the same optical setting. The full-width at half maximum of Te-L (3.8 keV) emission peak was 27 eV. Sn-L (3444 eV) and In-L (3487 eV) peaks, which cannot be resolved by a widely used energy-dispersive X-ray spectrometer.