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Negative effect of crystallization on the mechanism of laser damage in HfO$$_{2}$$/SiO$$_{2}$$ multilayer

Tateno, Ryo*; Okada, Hajime; Kosuge, Atsushi  ; Nagashima, Keisuke; Sugiyama, Akira; Kashiwagi, Kunihiro*

Elucidation for the mechanism of laser damage is indispensable to realize a high resistance mirror for the ultra-short pulse high intense lasers of the next generation. In this study, the surface and a section of a laser-damaged area of a laser mirror were observed with a laser microscope and a transmission electron microscope (cross-sectional TEM), respectively. A grain boundary of HfO$$_{2}$$ microcrystal was observed in the damaged area. This observation, and an evaluation of the mirror's damage resistance showed that the formation of crystals in the multilayer mirror is one of the major determinants of damage resistance.

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