Refine your search�ソスF     
Report No.
 - 

Development of a wideband multilayer grating with a new layer structure for a flat-field spectrometer attached to transmission electron microscopes in the 2-4 keV range

Imazono, Takashi; Koike, Masato

A soft X-ray spectrograph to attach to electron microscopes has been developed. Original TEM-SXES instruments can detect soft X-ray emission (SXE) spectra of the 60-2000 eV range. However it is necessary to develop a new SXES instrument that covers a much wider energy range. It is of importance to detect the SXE spectra from 2 keV to 4 keV. Observation of the SXE spectra in this energy range needs a multilayer grating because in which a typical grating with the gold coating is no longer practical. A conventional multilayer grating has high diffraction efficiency but narrow band at a fixed angle of incidence. It indicates that the SXES instrument should employ a mechanism for wavelength scanning to cover the required energy range and is unsuitable for the spectrograph to attach to a TEM. To overcome this problem, we have invented a new multilayer structure to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence.

Accesses

:

- Accesses

InCites™

:

Altmetrics

:

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.