検索対象:     
報告書番号:
※ 半角英数字
 年 ~ 
 年

Micro-fabrication of biodegradable polymers using focused ion beam

集束イオンビームによる生分解性高分子の微細加工

大久保 聡*; 高橋 朋宏*; 高澤 侑也*; 五輪 智子*; 佐々木 隆*; 長澤 尚胤; 玉田 正男; 大島 明博*; 田川 精一*; 鷲尾 方一*

Okubo, Satoshi*; Takahashi, Tomohiro*; Takasawa, Yuya*; Gowa, Tomoko*; Sasaki, Takashi*; Nagasawa, Naotsugu; Tamada, Masao; Oshima, Akihiro*; Tagawa, Seiichi*; Washio, Masakazu*

ポリカプロラクトン,ポリブチレンサクシネート・アジペート共重合体などの生分解性プラスチック材料に集束イオンビーム(FIB)を照射して直接エッチング処理を施すことで、ナノメートル分解能で微細加工が可能となった。フィルムあるいはスピンコートにより作製したシート状生分解性プラスチックにGaイオンのFIBを照射して、250ナノメートルの線幅を有する微孔膜や歯車などをナノメートル分解能で微細加工することに成功した。これらのことから、FIBを製造手段として生分解性プラスチックの医用・電子デバイス及びマイクロマシン分野への応用利用が期待される。

Microfabrication of biodegradable polymers such as poly(butylene succinate-${it co}$-adipate) (PBSA) and poly($$varepsilon$$-caprolactone) (PCL) were demonstrated using focused ion beam (FIB) with maskless direct etching. As the result, the micro structures of PBSA and PCL were obtained. The etching depth of both PBSA and PCL were increased with increasing FIB fluence, and the etching rates were estimated to be about 1.3 $$times$$ 10$$^{-18}$$ $$mu$$m/(ions cm$$^{-2}$$) and 1.2 $$times$$ 10$$^{-18}$$ $$mu$$m/(ions cm$$^{-2}$$), respectively. Moreover, very thin films of PBSA and PCL were made by spin-coating method. The thicknesses of the spin-coated samples were about 200 nm, and the surface roughness was less than 10 nm (RMS). The fine structures such as micro-gear of PBSA and PCL were obtained without solid debris. The line width of the fabricated structure was about 250 nm.

Access

:

- Accesses

InCites™

:

パーセンタイル:85.36

分野:Polymer Science

Altmetrics

:

[CLARIVATE ANALYTICS], [WEB OF SCIENCE], [HIGHLY CITED PAPER & CUP LOGO] and [HOT PAPER & FIRE LOGO] are trademarks of Clarivate Analytics, and/or its affiliated company or companies, and used herein by permission and/or license.