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Report No.

Prototype of thermo-optic switch consisting of Mach-Zehnder polymer waveguide drawn by focused proton beam

Miura, Kenta*; Sato, Takahiro; Ishii, Yasuyuki; Koka, Masashi; Takano, Katsuyoshi*; Okubo, Takeru; Yamazaki, Akiyoshi; Kada, Wataru; Yokoyama, Akihito; Kamiya, Tomihiro; Kiryu, Hiromu*; Ozawa, Yusuke*; Kubota, Atsushi*; Hanaizumi, Osamu*

The Mach-Zehnder (MZ) type thermo-optic switch consisting of two MZ couplers, two phase shifting branches and a titanium thin-film heater over one branch was prototyped in this work. A MZ type waveguide pattern with a core width of 8 $$mu$$m and a MZ coupling angle of 2$$^{circ}$$ in a PMMA film was drawn by a 1.7 MeV focused proton beam with the beam size of about 1 $$mu$$m and the total dose of 100 nC/mm$$^2$$. The titanium thin-film heater and aluminum electrodes were formed using conventional photolithography and wet-etching processes. In the operation test of the switch, a light with a wave length of 1.55 $$mu$$m was injected into one side of the switch through a single-mode optical fiber, and the output light from another side of the switch was observed by an IR camera with varying an electric power supplied to the heater. A switching power was estimated to be 43.9 mW for an On/Off ratio of 9.0 dB in the test. This result showed that the switching power could be reduced compared with those of commercial silica-based switches.



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